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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11666864 B1

PDFFull Text
Date of Patent:
Jun. 06, 2023

Filed:

Aug. 12, 2020

Filtering device, purification device, and method for manufacturing chemical liquid

Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventors:

Tetsuya Shimizu, Haibara-gun, JP;

Tetsuya Kamimura, Haibara-gun, JP;

Tadashi Omatsu, Haibara-gun, JP;

Satomi Takahashi, Haibara-gun, JP;

Assignee:

FUJIFILM Corporation, Tokyo, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Krishnan S Menon

Int. Cl.
CPC ...
B01D 61/58 (2006.01); B01D 3/14 (2006.01); B01D 61/08 (2006.01); B01D 61/18 (2006.01); B01D 65/02 (2006.01); B01D 69/02 (2006.01); B01D 69/12 (2006.01); B01D 71/26 (2006.01); B01D 71/36 (2006.01); B01D 71/56 (2006.01); H01L 21/67 (2006.01); G03F 7/26 (2006.01);
U.S. Cl.
CPC ...
B01D 61/58 (2013.01); B01D 3/145 (2013.01); B01D 61/08 (2013.01); B01D 61/18 (2013.01); B01D 65/02 (2013.01); B01D 69/02 (2013.01); B01D 69/12 (2013.01); B01D 71/26 (2013.01); B01D 71/36 (2013.01); B01D 71/56 (2013.01); H01L 21/67017 (2013.01); B01D 2311/25 (2013.01); B01D 2311/2669 (2013.01); B01D 2313/50 (2013.01); B01D 2317/025 (2013.01); B01D 2317/08 (2013.01); B01D 2325/02 (2013.01); B01D 2325/14 (2013.01); B01D 2325/16 (2013.01); G03F 7/26 (2013.01);
Abstract

A filtering device is for obtaining a chemical liquid by purifying a liquid to be purified, and has an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path which includes the filter A and the filter B arranged in series between the inlet portion and the outlet portion and extends from the inlet portion to the outlet portion, in which the filter A includes at least one kind of porous membrane selected from the group consisting of a first porous membrane having a porous base material made of polytetrafluoroethylene and a non-crosslinked coating which is formed to cover the porous base material and contains a perfluorosulfonic acid polymer and a second porous membrane containing polytetrafluoroethylene blended with a perfluorosulfonic acid polymer.

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