The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Mar. 17, 2021
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
Daisuke Kawamura, Kiyosu, JP;
Go Oike, Yokkaichi, JP;
Assignee:
Kioxia Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11578 (2017.01); H01L 27/11519 (2017.01); H01L 27/11526 (2017.01); H01L 27/11565 (2017.01); H01L 27/11573 (2017.01); H01L 27/11551 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11578 (2013.01); H01L 27/11519 (2013.01); H01L 27/11526 (2013.01); H01L 27/11551 (2013.01); H01L 27/11565 (2013.01); H01L 27/11573 (2013.01);
Abstract
A semiconductor device of an embodiment includes first and second structures arranged in a first hierarchy, in which the first and second structures are repeatedly arranged in a first direction along a plane of the first hierarchy, and a distance between geometric centers of the first and second structures in a minimum unit of repetition of the first and second structures differs between a first position and a second position in the first direction.