The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Dec. 04, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Frank Sinclair, Boston, MA (US);
Paul J. Murphy, Reading, MA (US);
Michael Honan, Peabody, MA (US);
Charles T. Carlson, Cedar Park, TX (US);
Assignee:
APPLIED Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 7/18 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H05H 7/18 (2013.01); H01J 37/3171 (2013.01);
Abstract
Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, the linear accelerator assembly may include a central support within a chamber, and a plurality of modules coupled to the central support, at least one module of the plurality of modules including an electrode having an aperture for receiving and delivering an ion beam along a beamline axis.