The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Jul. 13, 2020
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
JuIll Lee, Cheonan-si, KR;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F25D 17/08 (2006.01); F25D 29/00 (2006.01); F25D 25/00 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); F25D 17/08 (2013.01); F25D 25/00 (2013.01); F25D 29/005 (2013.01); C23C 16/4411 (2013.01);
Abstract
Disclosed is a heat shielding device which shields heat from a chamber wall to the outside by creating one or more gas insulating layers around a chamber heated to a high temperature, thereby reducing heat loss and power consumed when heating the chamber to a certain temperature and reducing safety problems such as burning of an operator.