The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Aug. 17, 2020
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Hyunji Song, Anyang-si, KR;
Sukkoo Hong, Suwon-si, KR;
Sumin Kim, Suwon-si, KR;
Yechan Kim, Suwon-si, KR;
Juyoung Kim, Usan, KR;
Jinjoo Kim, Seoul, KR;
Hyunwoo Kim, Seongnam-si, KR;
Juhyeon Park, Suwon-si, KR;
Songse Yi, Seoul, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/039 (2006.01); C07D 213/68 (2006.01); C07D 263/32 (2006.01); C07D 233/64 (2006.01); C07D 277/26 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07D 213/68 (2013.01); C07D 233/64 (2013.01); C07D 263/32 (2013.01); C07D 277/26 (2013.01); G03F 7/0392 (2013.01);
Abstract
A photo-decomposable compound, a photoresist composition, and a method of manufacturing an IC device, the compound generating acid upon exposure and acts as a quenching base that neutralizes acid in an unexposed state and being represented by Formula 1: