The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Jul. 27, 2021
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;
Abstract
The present invention relates to a Hall effect sensor which is integrated in a semiconductor substrate and enables measurement of a magnetic field component. perpendicularly to the surface of the semiconductor substrate. The Hall effect sensor comprises several Hall elements having an electrically conductive semiconductor region which has a straight-line row of electrical measuring and control contacts on an end face on the substrate surface. The Hall elements are designed or can be operated in such manner that they have a sensitivity both to a magnetic field component parallel to and the magnetic field component perpendicular to the substrate surface of the semiconductor substrate (). Several of the Hall elements are arranged such that their sensitivity to a magnetic field component parallel to the substrate surface of the semiconductor substrate can be compensated mutually by circuitry or in a signal evaluation. In this way, a sensitivity of these Hall elements to the magnetic field component perpendicular to the substrate surface of the semiconductor substrate is obtained. By using these Hall elements for measuring the magnetic field component perpendicularly to the substrate surface, a very low sensitivity to mechanical stresses can be achieved.