The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Jan. 14, 2021
Microelectronics Technology, Inc., Hsinchu, TW;
Ming-Che Liou, Hsinchu, TW;
MICROELECTRONICS TECHNOLOGY, INC., Hsinchu, TW;
Abstract
The present disclosure provides a microwave system, including a chamber and a microwave process circuit. The microwave process circuit is coupled to the chamber, and configured to radiate a polarized source microwave, receive a first reflected microwave, and radiate a polarized first reflected microwave into the chamber so as to heat a device under test in the chamber. The microwave process circuit includes a power generator, a first energy feeder, and a second energy feeder. The power generator is configured to generate a source microwave according to a reference signal and a control signal. The first energy feeder is configured to polarized the source microwave to the polarized source microwave, and radiate the polarized microwave into the chamber. The second energy feeder is configured to polarized the first reflected microwave to the polarized first reflected microwave, and radiate the polarized first reflected microwave into the chamber.