The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2023
Filed:
Jun. 24, 2019
Applicant:
Northwestern University, Evanston, IL (US);
Inventors:
Robert P. H. Chang, Glenview, IL (US);
Woongkyu Lee, Evanston, IL (US);
Assignee:
Northwestern University, Evanston, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); H01L 21/02 (2006.01); H01L 29/24 (2006.01);
U.S. Cl.
CPC ...
H01L 29/152 (2013.01); H01L 21/02175 (2013.01); H01L 21/02565 (2013.01); H01L 29/24 (2013.01);
Abstract
Superlattices and methods of making them are disclosed herein. The superlattices are prepared by irradiating a sample to prepare an alternating superlattice of layers of a first material and a second material, wherein the ratio of the first deposition rate to the second deposition rate is between 1.0:2.0 and 2.0:1.0. The superlattice comprises a multiplicity of alternating layers, wherein the multiplicity of layers of the first material have a thickness between 0.1 nm and 50.0 nm or the multiplicity of layers of the second material have a thickness between 0.1 nm and 50.0.