The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2023

Filed:

Aug. 31, 2020
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventors:

Masashi Yamaoka, Yokohama Kanagawa, JP;

Kazuhiro Tomishige, Yokkaichi Mie, JP;

Naoki Yamamoto, Kuwana Mie, JP;

Assignee:

KIOXIA CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/1157 (2017.01); H01L 25/065 (2023.01); H01L 23/538 (2006.01); G11C 16/04 (2006.01); G11C 5/06 (2006.01);
U.S. Cl.
CPC ...
H01L 25/0657 (2013.01); G11C 5/06 (2013.01); G11C 16/0483 (2013.01); H01L 23/5386 (2013.01); H10B 43/35 (2023.02);
Abstract

A semiconductor storage device includes a substrate, a plurality of conductive layers arranged in a first direction intersecting a surface of the substrate, and a semiconductor layer extending in the first direction and penetrating the plurality of conductive layers. The plurality of conductive layers includes a first conductive layer and a second conductive layer that are adjacent to each other, a third conductive layer and a fourth conductive layer that are adjacent to each other, and a fifth conductive layer and a sixth conductive layer that are adjacent to each other. When a distance between the first conductive layer and the second conductive layer in the first direction is a first distance, a distance between the third conductive layer and the fourth conductive layer in the first direction is a second distance, and a distance between the fifth conductive layer and the sixth conductive layer in the first direction is a third distance, the second distance is smaller than the first distance, and the third distance is smaller than the second distance.


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