The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2023

Filed:

Dec. 16, 2019
Applicant:

Analog Devices, Inc., Norwood, MA (US);

Inventors:

Igor P. Prikhodko, Reading, MA (US);

Michael Judy, Ipswich, MA (US);

Assignee:

Analog Devices, Inc., Wilmington, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/24 (2006.01); G01C 19/5684 (2012.01); B81B 3/00 (2006.01); G01C 19/567 (2012.01); G01C 19/5677 (2012.01);
U.S. Cl.
CPC ...
G01C 19/24 (2013.01); B81B 3/0027 (2013.01); G01C 19/567 (2013.01); G01C 19/5677 (2013.01); G01C 19/5684 (2013.01); B81B 2201/0242 (2013.01);
Abstract

An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.


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