The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2023

Filed:

Aug. 18, 2020
Applicant:

Imec Vzw, Leuven, BE;

Inventors:

Bernardette Kunert, Wilsele, BE;

Robert Langer, Heverlee, BE;

Yves Mols, Wijnegem, BE;

Marina Baryshnikova, Leuven, BE;

Assignee:

Imec VZW, Leuven, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/04 (2006.01); C30B 25/10 (2006.01); C30B 25/18 (2006.01); C30B 29/42 (2006.01); C30B 29/60 (2006.01); H01L 21/762 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
C30B 25/04 (2013.01); C30B 25/105 (2013.01); C30B 25/18 (2013.01); C30B 29/42 (2013.01); C30B 29/60 (2013.01); H01L 21/76224 (2013.01); H01L 21/76877 (2013.01);
Abstract

A method for growing at least one III/V nano-ridge on a silicon substrate in an epitaxial growth chamber. The method comprises: patterning an area on a silicon substrate thereby forming a trench on the silicon substrate; growing the III/V nano-ridge by initiating growth of the III/V nano-ridge in the trench, thereby forming and filling layer of the nano-ridge inside the trench, and by continuing growth out of the trench on top of the filling layer, thereby forming a top part of the nano-ridge, wherein at least one surfactant is added in the chamber when the nano-ridge is growing out of the trench.


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