The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2023
Filed:
Dec. 17, 2018
Applicant:
Wacker Chemie Ag, Munich, DE;
Inventor:
Markus Wenzeis, Wurmannsquick, DE;
Assignee:
WACKER CHEMIE AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01); C01B 33/03 (2006.01); C23C 16/24 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C01B 33/03 (2013.01); C23C 16/24 (2013.01);
Abstract
Polycrystalline silicon is produced in a chemical vapour deposition reactor, wherein, outside the reactor at at least one position on at least one reactor component, vibrations of the reactor are measured using a measurement device and optionally recorded. The vibrations may be used to identify rod fall over and other events occurring within the reactor.