The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2023

Filed:

Sep. 17, 2020
Applicants:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;

Kawasaki Robotics (Usa), Inc., Wixom, MI (US);

Inventors:

Masaya Yoshida, Himeji, JP;

Hajime Nakahara, San Jose, CA (US);

George Chin, San Leandro, CA (US);

Luc Nguyen, Pleasanton, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/00 (2006.01); B25J 11/00 (2006.01); H01L 21/687 (2006.01); B25J 9/16 (2006.01); B25J 13/08 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0014 (2013.01); B25J 9/1664 (2013.01); B25J 11/0095 (2013.01); B25J 13/088 (2013.01); H01L 21/68707 (2013.01);
Abstract

A robot system according to an embodiment may include a robot, a wafer jig that is held by the robot, a positioning base, a positional displacement detection device, a control part, and an offset acquisition part for acquiring an offset that occurs between a command position for the robot and an actual position. The positioning base includes contacting members. The wafer jig has a tapered surface. The tapered surface guides the wafer jig so that a center of the wafer jig approaches a predetermined position as a position where the taped surface contacts the contacting members is relatively higher. The robot places the wafer jig on the positioning base, then holds and conveys the wafer jig to the positional displacement detection device. The offset acquisition part acquires the offset based on a result in which the positional displacement detection device detects a positional displacement of the conveyed wafer jig.


Find Patent Forward Citations

Loading…