The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2023
Filed:
Mar. 24, 2020
Seiko Epson Corporation, Tokyo, JP;
Yoshihiko Yokoyama, Chino, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A resonance device includes a first substrate formed of a semiconductor material or a glass material and having a recess which has an opening in a first main surface, a second substrate bonded to the first main surface and configured to close the opening of the recess, and a resonator element housed in the recess. An inner surface of the recess includes a side surface, a bottom surface, and a connection surface connecting the side surface and the bottom surface, the connection surface is a curved surface, and L1<L2, wherein L1 is a length of the connection surface in a first direction, and L2 is a length in a second direction orthogonal to the first direction.