The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2023

Filed:

Dec. 29, 2020
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Baher Haroun, Allen, TX (US);

Tobias Bernhard Fritz, Mainburg, DE;

Michael Szelong, Freising, DE;

Ernst Muellner, Munich, DE;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/113 (2006.01); H01L 27/20 (2006.01); G01L 1/18 (2006.01); H01L 41/311 (2013.01); H01L 25/16 (2023.01); H01L 23/31 (2006.01); H01L 41/053 (2006.01);
U.S. Cl.
CPC ...
H01L 41/311 (2013.01); G01L 1/18 (2013.01); H01L 23/3107 (2013.01); H01L 25/165 (2013.01); H01L 27/20 (2013.01); H01L 41/053 (2013.01); H01L 41/1132 (2013.01);
Abstract

An integrated circuit is described herein that includes a semiconductor substrate. First and second piezoresistive sensors are on or in the substrate where each have a respective sensing axis extending in first and second directions respectively parallel with a surface of the substrate, where the second direction is perpendicular to the first direction. A third piezoresistive sensor is on or in the substrate and has a respective sensing axis extending in a third direction parallel with the surface of the substrate and neither parallel nor perpendicular to the first and second directions.


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