The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2023
Filed:
Oct. 27, 2022
Applicant:
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Inventor:
Hideaki Yagyu, Tokyo, JP;
Assignee:
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 61/30 (2006.01); H01J 61/36 (2006.01); H01J 61/16 (2006.01);
U.S. Cl.
CPC ...
H01J 61/302 (2013.01); H01J 61/16 (2013.01); H01J 61/361 (2013.01);
Abstract
An excimer lamp includes light-emitting gases containing krypton gas and chlorine gas in a sealing body composed of fused quartz glass having an absorption band at least in a wavelength band of 240 nm to 260 nm. An ultraviolet light irradiation device includes: an excimer lamp having light-emitting gases containing krypton gas and chlorine gas in a sealing body; a housing having an extraction part for extracting ultraviolet light emitted from an excimer lamp; and fused quartz glass disposed in the extraction part and having an absorption band at least in a wavelength band of 240 nm to 260 nm.