Six-dimensional force sensor with high sensitivity and low inter-dimensional coupling

Abstract

The present invention discloses a six-dimensional force sensor with high sensitivity and low inter-dimensional coupling, including a clockwise or counterclockwise swastika-shaped beam, vertical beams, a rectangular outer frame, and strain gauges; the clockwise or counterclockwise swastika-shaped beam includes a cross-shaped transverse beam and four rectangular transverse beams; a center of the cross-shaped transverse beam is provided with several force application holes used for applying forces and moments; four tail ends of the cross-shaped transverse beam are each connected to one of the rectangular transverse beams to form a clockwise or counterclockwise swastika-shaped structure; a top end of a vertical beam is connected to a tail end of a corresponding rectangular transverse beam, and bottom ends of the vertical beams are connected to the rectangular outer frame; and there are a plurality of strain gauges to form six groups of Wheatstone bridges that are respectively used for measuring an X-direction force, a Y-direction force, a Z-direction force, an X-direction moment, a Y-direction moment, and a Z-direction moment. Strain gauges for measuring the forces are all pasted on the cross-shaped transverse beam, strain gauges for measuring the X-direction moment and the Y-direction moment are all pasted on the four rectangular transverse beams, and strain gauges for measuring the Z-direction moment are all pasted on the four vertical beams. According to the present invention, the structure is simple, and inter-dimensional coupling is low while high sensitivity is ensured.