The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2023

Filed:

Mar. 05, 2021
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventor:

Lasse Aaltonen, Espoo, FI;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5726 (2012.01); B81B 7/02 (2006.01); G01C 19/5712 (2012.01); G01C 19/5776 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5726 (2013.01); B81B 7/02 (2013.01); G01C 19/5712 (2013.01); G01C 19/5776 (2013.01); B81B 2201/0242 (2013.01);
Abstract

A MEMS gyroscope and a method for compensating drift of sensitivity of a MEMS gyroscope are disclosed. The method comprises demodulating an angular rate signal with an in-phase carrier signal for producing a raw rate signal, and obtaining a DC test signal The DC test signal is filtered for obtaining a raw test signal, and zeroing offset of the raw test signal is performed by comparing each sample of the raw test signal to a test signal normalization value for producing an offset zeroed test signal that represents a deviation of the sample of the raw test signal from the test signal normalization value. A sensitivity compensation multiplier is determined based upon the offset zeroed test signal and a predefined gain coefficient, and drift of sensitivity is compensated by multiplying the raw rate signal with the sensitivity compensation multiplier for providing a sensitivity compensated rate signal.


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