The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2023

Filed:

Sep. 25, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Huan Hu, Yorktown Heights, NY (US);

Joshua T. Smith, Croton on Hudson, NY (US);

Gustavo A. Stolovitzky, Riverdale, NY (US);

Benjamin H. Wunsch, Mt. Kisco, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B01L 3/00 (2006.01); H01L 21/3105 (2006.01); H01L 21/3213 (2006.01); H01L 29/06 (2006.01); B82Y 5/00 (2011.01); G01N 15/02 (2006.01); B82Y 15/00 (2011.01); H01L 21/306 (2006.01); G01N 15/00 (2006.01);
U.S. Cl.
CPC ...
B01L 3/502753 (2013.01); B82Y 5/00 (2013.01); B82Y 15/00 (2013.01); G01N 15/0255 (2013.01); H01L 21/31055 (2013.01); H01L 21/31056 (2013.01); H01L 21/3213 (2013.01); H01L 29/0676 (2013.01); B01L 2200/0652 (2013.01); B01L 2200/12 (2013.01); B01L 2300/0896 (2013.01); B01L 2400/086 (2013.01); G01N 2015/0053 (2013.01); G01N 2015/0065 (2013.01); G01N 2015/0288 (2013.01); H01L 21/30604 (2013.01);
Abstract

Techniques relate to forming a sorting device. A mesh is formed on top of a substrate. Metal assisted chemical etching is performed to remove substrate material of the substrate at locations of the mesh. Pillars are formed in the substrate by removal of the substrate material. The mesh is removed to leave the pillars in a nanopillar array. The pillars in the nanopillar array are designed with a spacing to sort particles of different sizes such that the particles at or above a predetermined dimension are sorted in a first direction and the particles below the predetermined dimension are sorted in a second direction.


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