The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2023
Filed:
Jul. 08, 2019
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Jeronimo Segovia Fernandez, San Jose, CA (US);
Peter Smeys, San Jose, CA (US);
Ting-Ta Yen, San Jose, CA (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); H03H 9/64 (2006.01); H03H 9/02 (2006.01); H03H 9/15 (2006.01); H03H 9/05 (2006.01);
U.S. Cl.
CPC ...
H03H 9/175 (2013.01); H03H 9/02275 (2013.01); H03H 9/0542 (2013.01); H03H 9/64 (2013.01); H03H 2009/02299 (2013.01); H03H 2009/155 (2013.01);
Abstract
A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.