The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2023
Filed:
Feb. 15, 2018
Applicant:
Shin-etsu Polymer Co., Ltd., Tokyo, JP;
Inventors:
Osamu Ogawa, Saitama, JP;
Kiminori Tominaga, Itoigawa, JP;
Assignee:
Shin-Etsu Polymer Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); F16K 27/02 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6732 (2013.01); F16K 27/0209 (2013.01); H01L 21/67376 (2013.01); H01L 21/67379 (2013.01); H01L 21/67383 (2013.01); H01L 21/67389 (2013.01); H01L 21/67393 (2013.01); H01L 21/67769 (2013.01);
Abstract
A substrate storage container comprises a container body capable of containing a plurality of substrates, and an air supply member capable of supplying gas from outside of the container body to an internal space, wherein for the substrate storage container the container body is formed in a front open box and the air supply member is attached to the bottom surface, and wherein a functional unit that changes the environment of the internal space to different states are connected with the air supply member so as to be able to be exchanged.