The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 09, 2023

Filed:

Apr. 14, 2022
Applicant:

Tower Semiconductor Ltd., Migdal Haemek, IL;

Inventors:

Yakov Roizin, Afula, IL;

Evgeny Pikhay, Migdal Haemek, IL;

Vladislav Dayan, Migdal Haemek, IL;

Assignee:

Tower Semiconductor Ltd., Migdal Haemek, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01T 1/02 (2006.01); H01L 27/146 (2006.01); H01L 31/119 (2006.01); H01L 31/0216 (2014.01);
U.S. Cl.
CPC ...
G01T 1/026 (2013.01); H01L 27/14623 (2013.01); H01L 27/14659 (2013.01); H01L 31/02164 (2013.01); H01L 31/119 (2013.01);
Abstract

A method for radiation dosage measurement includes: (1) exposing a plurality of single-poly floating gate sensor cells to radiation; (2) measuring threshold voltage differences between logical pairs of the exposed sensor cells using differential read operations, wherein the sensor cells of each logical pair are separated by a distance large enough that radiation impinging on one of the sensor cells does not influence the other sensor cell; (3) determining whether each logical pair of exposed sensor cells is influenced by exposure to the radiation in response to the corresponding measured threshold voltage difference; and (4) determining a dosage of the radiation in response to the number of logical pairs of the exposed sensor cells determined to be influenced by exposure to the radiation. A non-radiation influenced threshold voltage shift may be measured and used in determining whether each logical pair of exposed sensor cells is influenced by radiation exposure.


Find Patent Forward Citations

Loading…