The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2023
Filed:
Sep. 07, 2017
Applicant:
Georgia Tech Research Corporation, Atlanta, GA (US);
Inventors:
Haoran Wen, Atlanta, GA (US);
Farrokh Ayazi, Atlanta, GA (US);
Assignee:
Georgia Tech Research Corporation, Atlanta, GA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5684 (2012.01); B81B 7/02 (2006.01); G01C 19/5698 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5684 (2013.01); B81B 7/02 (2013.01); G01C 19/5698 (2013.01); B81B 2201/0242 (2013.01); B81B 2201/0271 (2013.01);
Abstract
A microelectromechanical resonator includes a resonator member suspended over a surface of a substrate by at least one anchor that is connected to the substrate. The resonator member includes outer and inner frames that are concentrically arranged and mechanically coupled by support structures extending therebetween. Related apparatus and gyroscopes are also discussed.