The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 09, 2023

Filed:

Nov. 07, 2019
Applicant:

Nanofilm Technologies International Limited, Singapore, SG;

Inventors:

Xu Shi, Singapore, SG;

Zhi Tang, Singapore, SG;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/06 (2006.01); C23C 28/04 (2006.01); C23C 14/02 (2006.01); C23C 14/32 (2006.01); C23C 14/34 (2006.01); C23C 28/00 (2006.01);
U.S. Cl.
CPC ...
C23C 28/046 (2013.01); C23C 14/025 (2013.01); C23C 14/0605 (2013.01); C23C 14/0635 (2013.01); C23C 14/325 (2013.01); C23C 14/3407 (2013.01); C23C 28/36 (2013.01);
Abstract

A substrate is coated with a multi-layer coating, comprising in order: (i) a first functional layer comprising ta-C, (ii) a second functional layer comprising ta-C, (iii) (a) a third functional layer comprising ta-C and a first intermediate layer comprising a carbide of a first element, or (b) a first intermediate layer comprising a carbide of a first element, and a second intermediate layer comprising the first element, wherein the ta-C has a hydrogen content less than 10% and an sp2 content less than 30%; wherein (i) the Young's modulus or (ii) the hardness or (iii) both the Young's modulus and the hardness independently stay the same or increase from layer to layer in (iii) (a) from the first intermediate layer to the first functional layer, or in (iii) (b) from the second intermediate layer to the first functional layer.


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