The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2023
Filed:
Nov. 26, 2018
Asm Ip Holding B.v., Almere, NL;
Bartholomeus Hans Louis Lindeboom, Blaricum, NL;
Juul Keijser, Amersfoort, NL;
ASM IP Holding B.V., Almere, NL;
Abstract
An apparatus (), including a gas recirculation circuit comprising a mini environment chamber (), a gas pump (), a filter assembly () which are connected by a recirculation channel (). The apparatus additionally includes an air supply conduit () for supplying air to the gas recirculation circuit and having an air supply conduit inlet () which opens into the ambient air and an air supply conduit outlet () which opens in the recirculation circuit. In use, a mini environment chamber pressure (P) is maintained higher than the ambient pressure (P). The gas recirculation channel () includes a substantially frictionless recirculation restriction embodied as a throat (). At downstream end of the throat which forms the narrow part of the throat, in use, the static pressure is below the ambient pressure. The air supply conduit outlet opens at the downstream end () of the throat.