The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2023

Filed:

Nov. 12, 2019
Applicant:

Bfly Operations, Inc., Guilford, CT (US);

Inventors:

Keith G. Fife, Palo Alto, CA (US);

Lingyun Miao, Fremont, CA (US);

Jianwei Liu, Fremont, CA (US);

Jonathan M. Rothberg, Guilford, CT (US);

Assignee:

BFLY OPERATIONS, INC., Burlington, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); B06B 1/02 (2006.01); B81C 1/00 (2006.01); A61B 8/00 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0292 (2013.01); A61B 8/4494 (2013.01); B81B 7/0038 (2013.01); B81C 1/00285 (2013.01); A61B 2562/12 (2013.01); B06B 2201/76 (2013.01); B81B 2201/0271 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/04 (2013.01);
Abstract

A method of forming an ultrasonic transducer device includes bonding a membrane to seal a transducer cavity with at least a portion of a getter material layer being exposed, the getter material layer comprising a portion of a bilayer stack compatible for use in damascene processing.


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