The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Aug. 11, 2022
Akoustis, Inc., Huntersville, NC (US);
Jeffrey B. Shealy, Davidson, NC (US);
Michael Hodge, Huntersville, NC (US);
Rohan W. Houlden, Oak Ridge, NC (US);
Shawn R. Gibb, Huntersville, NC (US);
Mary Winters, Huntersville, NC (US);
Ramakrishna Vetury, Huntersville, NC (US);
David M. Aichele, Huntersville, NC (US);
AKOUSTIS, INC., Huntersville, NC (US);
Abstract
An RF filter system including a plurality of BAW resonators arranged in a circuit, the circuit including a serial configuration of resonators and a parallel shunt configuration of resonators, the circuit having a circuit response corresponding to the serial configuration and the parallel configuration of the plurality of bulk acoustic wave resonators including a transmission loss from a pass band having a bandwidth from 5.490 GHz to 5.835 GHz. Resonators include a support member with a multilayer reflector structure; a first electrode including tungsten; a piezoelectric film including aluminum scandium nitride; a second electrode including tungsten; and a passivation layer including silicon nitride. At least one resonator includes at least a portion of the first electrode located within a cavity region defined by a surface of the support member.