The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2023

Filed:

Jan. 22, 2021
Applicant:

SK Hynix Inc., Icheon-si, KR;

Inventors:

Seong Ho Choi, Icheon-si, KR;

Jin Ho Kim, Icheon-si, KR;

Assignee:

SK hynix Inc., Icheon-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 25/18 (2006.01); G11C 16/08 (2006.01); H01L 23/00 (2006.01); H01L 25/065 (2006.01); H01L 27/11556 (2017.01); H01L 27/11582 (2017.01);
U.S. Cl.
CPC ...
H01L 25/18 (2013.01); G11C 16/08 (2013.01); H01L 24/08 (2013.01); H01L 25/0657 (2013.01); H01L 27/11556 (2013.01); H01L 27/11582 (2013.01); H01L 2224/08145 (2013.01); H01L 2924/1431 (2013.01); H01L 2924/14511 (2013.01);
Abstract

A three-dimensional semiconductor memory device may include a cell wafer including a source plate, a plurality of first word lines stacked to be spaced apart from one another along a plurality of first vertical channels projecting from a bottom surface of the source plate in a vertical direction, and a plurality of second word lines stacked to be spaced apart from one another along a plurality of second vertical channels projecting from a top surface of the source plate in a vertical direction; a first peripheral wafer bonded to a bottom surface of the cell wafer, and including a first row decoder unit which transfers an operating voltage to the plurality of first word lines; and a second peripheral wafer bonded to a top surface of the cell wafer, and including a second row decoder unit which transfers an operating voltage to the plurality of second word lines.


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