The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2023

Filed:

Aug. 02, 2018
Applicant:

Oerlikon Surface Solutions Ag, Pfäffikon, Pfäffikon, CH;

Inventors:

Siegfried Krassnitzer, Feldkirch, AT;

Sebastien Guimond, St. Gallen, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/32 (2006.01); C23C 14/35 (2006.01); C23C 14/54 (2006.01); C23C 16/27 (2006.01); C23C 16/44 (2006.01); C23C 16/46 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32522 (2013.01); C23C 14/325 (2013.01); C23C 14/35 (2013.01); C23C 14/541 (2013.01); C23C 16/27 (2013.01); C23C 16/4411 (2013.01); C23C 16/463 (2013.01); H01J 37/32477 (2013.01); H01J 37/32651 (2013.01); H01J 37/3405 (2013.01); H01J 2237/002 (2013.01); H01J 2237/3321 (2013.01);
Abstract

The present invention relates to a coating device comprising a vacuum coating chamber for conducting vacuum coating processes, said vacuum coating chamber comprising: —one or more cooled chamber wallshaving an inner sideb and a cooled sidea, —protection shields being arranged in the interior of the chamber as one or more removable shielding plates, which cover at least part of the surface of the inner sideb of the one or more cooled chamber walls, wherein at least one removable shielding plateis placed forming a gapin relation to the surface of the inner sideb of the cooled chamber wallthat is covered by said removable shielding plate, wherein: —thermal conductive meansare arranged filling the gapin an extension corresponding to at least a portion of the total surface of the inner sideb of the cooled chamber wallthat is covered by said removable shielding plate, wherein the thermal conductive meansenable conductive heat transfer between said removable shielding plateand the respectively covered cooled chamber wall


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