The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2023

Filed:

Jan. 05, 2021
Applicant:

Eagle Harbor Technologies, Inc., Seattle, WA (US);

Inventors:

Timothy Ziemba, Bainbridge Island, WA (US);

Ilia Slobodov, Seattle, WA (US);

John Carscadden, Seattle, WA (US);

Kenneth Miller, Seattle, WA (US);

Morgan Quinley, Seattle, WA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); H02M 3/335 (2006.01); H03K 3/57 (2006.01); H05K 7/20 (2006.01); H03M 1/12 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32146 (2013.01); H01J 37/32082 (2013.01); H01J 37/32091 (2013.01); H01J 37/32128 (2013.01); H01J 37/32174 (2013.01); H01J 37/32541 (2013.01); H01J 37/32568 (2013.01); H01J 37/32715 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); H02M 3/33523 (2013.01); H03K 3/57 (2013.01); H03M 1/12 (2013.01); H05K 7/20154 (2013.01); H05K 7/20172 (2013.01); H05K 7/20254 (2013.01); H05K 7/20272 (2013.01); H05K 7/20281 (2013.01); H05K 7/20509 (2013.01);
Abstract

Some embodiments include a high voltage pulsing power supply. A high voltage pulsing power supply may include: a high voltage pulser having an output that provides pulses with an amplitude greater than about 1 kV, a pulse width greater than about 1 μs, and a pulse repetition frequency greater than about 20 kHz; a plasma chamber; and an electrode disposed within the plasma chamber that is electrically coupled with the output of the high voltage pulser to produce a pulsing an electric field within the chamber.


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