The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2023

Filed:

May. 22, 2020
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, 's-Gravenhage, NL;

Inventors:

Sri Ram Shankar Rajadurai, Delft, NL;

Daniele Piras, Amsterdam, NL;

Kodai Hatakeyama, Pijnacker, NL;

Paul Louis Maria Joseph Van Neer, Bergschenhoek, NL;

Maarten Hubertus Van Es, Voorschoten, NL;

Hamed Sadeghian Marnani, Nootdorp, NL;

Marcus Johannes Van Der Lans, Hillegom, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/36 (2010.01); G01Q 60/34 (2010.01); G01Q 20/02 (2010.01); G01N 29/06 (2006.01); G01Q 60/32 (2010.01); G01N 29/44 (2006.01);
U.S. Cl.
CPC ...
G01Q 60/32 (2013.01); G01N 29/06 (2013.01); G01N 29/0681 (2013.01); G01N 29/4436 (2013.01); G01Q 20/02 (2013.01); G01Q 60/366 (2013.01);
Abstract

The present document relates to a heterodyne scanning probe microscopy (SPM) method for subsurface imaging, and includes: applying an acoustic input signal to a sample and sensing an acoustic output signal using a probe. The acoustic input signal comprises a plurality of signal components at unique frequencies, including a carrier frequency and at least two excitation frequencies. The carrier frequency and the excitation frequencies form a group of frequencies, which are distributed with an equal difference frequency between each two subsequent frequencies of the group. The difference frequency is below a sensitivity threshold frequency of the cantilever for enabling sensing of the acoustic output signal. The document also describes an SPM system.


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