The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2023

Filed:

Jan. 28, 2020
Applicant:

Optikos Corporation, Wakefield, MA (US);

Inventor:

David Imrie, Andover, MA (US);

Assignee:

Optikos Corporation, Wakefield, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M 11/02 (2006.01); G01B 11/06 (2006.01); G01B 21/08 (2006.01); G02F 1/01 (2006.01);
U.S. Cl.
CPC ...
G01M 11/0221 (2013.01); G01B 11/06 (2013.01); G01B 21/085 (2013.01); G02F 1/0147 (2013.01);
Abstract

A portable optic metrology thermal chamber module including a housing defining a thermal chamber, with a thermally isolated environment arranged for holding an optic device under test, the housing having an optic stimulus entry aperture configured for entry of a stimulus beam, from a metrology system stimulus source through the entry aperture onto an entry pupil of the device to an image analyzer, and a module mount coupling to modularly mount the portable optic metrology thermal chamber module to a support of a metrology system of the metrology system stimulus source so as to removably couple the portable optic metrology thermal chamber module as a unit to the support in a predetermined position relative to the metrology system stimulus source, and the housing is sized and shaped so that the portable optic metrology thermal chamber module is portable as a unit for moving to and removing from the predetermined position.


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