The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2023

Filed:

Aug. 29, 2019
Applicant:

University of Hyogo, Kobe, JP;

Inventor:

Kunihiro Sato, Himeji, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02015 (2022.01); G01B 9/02 (2022.01); G03H 1/04 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02032 (2013.01); G01B 9/02038 (2013.01); G01B 9/02047 (2013.01); G03H 1/0443 (2013.01);
Abstract

The illumination light condensing point Pand the reference light condensing point Pare arranged as mirror images of each other with respect to the virtual plane VP, and each data of the object light O, being a reflected light of the spherical wave illumination light Q, and the inline spherical wave reference light L is recorded on each hologram. On the virtual plane VP, the reconstructed object light hologram hfor measurement is generated, and the spherical wave optical hologram srepresenting a spherical wave light emitted from the reference light condensing point Pis analytically generated. The height distribution of the surface to be measured of the object 4 is obtained from the phase distribution obtained by dividing the reconstructed object light hologram hby the spherical wave light hologram s.


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