The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Nov. 16, 2018
Applicant:
Rasirc, Inc., San Diego, CA (US);
Inventors:
Richard D. Blethen, Vista, CA (US);
Jeffrey J. Spiegelman, San Diego, CA (US);
Russell J. Holmes, San Diego, CA (US);
Daniel Alvarez, Jr., Oceanside, CA (US);
Jian Yang, San Diego, CA (US);
Ericca Lynne Speed, San Diego, CA (US);
Assignee:
RASIRC, INC., San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F17C 11/00 (2006.01); B01D 15/00 (2006.01); B01D 19/00 (2006.01); B01J 20/26 (2006.01); B01J 20/28 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
F17C 11/00 (2013.01); B01D 15/00 (2013.01); B01D 19/0005 (2013.01); B01J 20/261 (2013.01); B01J 20/28033 (2013.01); B01J 20/28047 (2013.01); B01J 20/28061 (2013.01); B01J 20/28064 (2013.01); C23C 16/45561 (2013.01); F17C 2201/0109 (2013.01); F17C 2227/045 (2013.01);
Abstract
Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.