The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2023

Filed:

Oct. 28, 2020
Applicant:

Murata Manufacturing Co., Ltd., Kyoto, JP;

Inventors:

Nobuhira Tanaka, Kyoto, JP;

Masaaki Fujisaki, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 43/04 (2006.01); F04B 49/22 (2006.01); H01L 41/09 (2006.01); F16K 7/17 (2006.01); F16K 15/14 (2006.01); F16K 31/02 (2006.01); F04B 43/14 (2006.01);
U.S. Cl.
CPC ...
F04B 43/04 (2013.01); F04B 43/046 (2013.01); F04B 49/22 (2013.01); F16K 7/17 (2013.01); F16K 15/14 (2013.01); H01L 41/0973 (2013.01); F04B 43/14 (2013.01); F16K 31/02 (2013.01);
Abstract

A pump () includes: a flat plate (); a piezoelectric element (); a flat plate (); a side wall (); a support member (); a support member (); a shielding plate (); a ventilation hole (); a ventilation hole (); a film valve (); and a film valve (). The film valve () is arranged in a region where the flat plate () and the shielding plate () face each other. The film valve () is arranged in a region where the flat plate () and the shielding plate () face each other. A center side of one of the film valve () and the film valve () is fixed in a state in which an outer edge side is movable, and the outer edge side of the other is fixed in a state in which the center side is movable.


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