The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Jun. 09, 2021
Applicant:
Egtm Co., Ltd., Gyeonggi-do, KR;
Inventors:
Assignee:
EGTM Co., Ltd., Suwon-Si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 9/00 (2006.01); C23C 16/18 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C07F 9/00 (2013.01); C23C 16/18 (2013.01); C23C 16/45527 (2013.01);
Abstract
A group 5 metal compound according to an embodiment of the present disclosure is represented by any one of the following <Chemical Formula 1> and <Chemical Formula 2>: In <Chemical Formula 1> and <Chemical Formula 2>,
Lee, Tae. (2023). Group 5 metal compound for thin film deposition and method of forming group 5 metal-containing thin film using same (U.S. Patent No. 11634441). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11634441
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile