The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 18, 2023

Filed:

Mar. 26, 2019
Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Tomoyoshi Tai, Inazawa, JP;

Masahiko Namerikawa, Seto, JP;

Yudai Uno, Nagoya, JP;

Ryosuke Hattori, Ichinomiya, JP;

Keiichiro Asai, Nagoya, JP;

Assignee:

NGK INSULATORS, LTD., Nagoya, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 3/10 (2006.01); H03H 9/25 (2006.01); H03H 9/02 (2006.01); H03H 3/08 (2006.01); H03H 3/02 (2006.01); H01L 41/187 (2006.01); H01L 41/35 (2013.01); H01L 41/312 (2013.01);
U.S. Cl.
CPC ...
H03H 3/10 (2013.01); H01L 41/187 (2013.01); H01L 41/312 (2013.01); H01L 41/35 (2013.01); H03H 3/02 (2013.01); H03H 3/08 (2013.01); H03H 9/02047 (2013.01); H03H 9/02559 (2013.01); H03H 9/02574 (2013.01); H03H 9/02614 (2013.01); H03H 9/02834 (2013.01); H03H 9/25 (2013.01);
Abstract

An acoustic wave device includes a piezoelectric material substrate, an intermediate layer on the piezoelectric material substrate and composed of one or more materials selected from the group consisting of silicon oxide, aluminum nitride and sialon. A bonding layer is on the intermediate layer and is composed of one or more materials selected from the group consisting of tantalum pentoxide, niobium pentoxide, titanium oxide, mullite, alumina, and a high resistance silicon and hafnium oxide. A supporting body is composed of a polycrystalline ceramic and is bonded to the bonding layer by direct bonding, and an electrode is on the piezoelectric material substrate.


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