The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2023
Filed:
Jul. 08, 2020
Applicant:
Ablic Inc., Tokyo, JP;
Inventors:
Hiroaki Takasu, Tokyo, JP;
Yoko Serizawa, Tokyo, JP;
Hiroya Suzuki, Tokyo, JP;
Sumitaka Goto, Tokyo, JP;
Assignee:
ABLIC INC., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); G01R 31/2884 (2013.01); H01L 22/14 (2013.01);
Abstract
Provided is a semiconductor device that allows reduction of a measurement time of a PCMTEG and improvement of productivity in an IC manufacturing process. A PCMTEG regionformed on a surface of a semiconductor substrate is divided into a main PCMTEG regionand a sub-PCMTEG region, and TEGs having specifications for their electrical characteristic values are all collectively arranged in the sub-PCMTEG region