The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 18, 2023

Filed:

Jan. 31, 2018
Applicant:

Ngk Spark Plug Co., Ltd., Nagoya, JP;

Inventor:

Kaname Miwa, Nagoya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H05B 3/06 (2006.01); H05B 3/10 (2006.01); H05B 3/28 (2006.01); H05B 3/74 (2006.01); H05B 1/02 (2006.01); H05B 3/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67098 (2013.01); H01L 21/67103 (2013.01); H01L 21/6831 (2013.01); H05B 1/0233 (2013.01); H05B 3/02 (2013.01); H05B 3/06 (2013.01); H05B 3/10 (2013.01); H05B 3/283 (2013.01); H05B 3/74 (2013.01); H01L 21/02 (2013.01);
Abstract

A holding apparatus including a holding substrate having a first main face on one side in a thickness direction thereof, and a heat generation section which is disposed in the holding substrate and generates heat when energized. The heat generation section includes a plurality of first heating elements arrayed in a planar direction orthogonal to the thickness direction of the holding substrate, and a second heating element disposed on a side toward the first main face in the thickness direction with respect to the plurality of first heating elements. Any one of the plurality of first heating elements is electrically connected to the second heating element in series through a first via extending in the thickness direction within the holding substrate.


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