The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 18, 2023

Filed:

Jun. 15, 2021
Applicant:

Oerlikon Surface Solutions Ag, Pfäffikon, Pfäffikon, CH;

Inventors:

Siegfried Krassnitzer, Feldkirch, AT;

Juerg Hagmann, Sax, CH;

Andreas Peter Treuholz, Bad Ragaz, CH;

Dominik Erwin Widmer, Vilters, CH;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/325 (2013.01); H01J 37/32055 (2013.01); H01J 37/32064 (2013.01); H01J 2237/332 (2013.01);
Abstract

An arc ignition device for cathodic arc deposition of a target material onto a substrate, comprising a trigger finger arranged moveable between a contacting position and a resting position, wherein in the contacting position a side surface of an adjacent target can be physically contacted by the trigger finger, and in the resting position the adjacent target cannot be contacted by the trigger finger, wherein during cathodic arc deposition of a target material, the trigger finger is arranged movable between the contacting position and the resting position in such a way that the contamination of the trigger finger with deposited target material during the cathodic arc deposition of the target material can be minimized.


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