The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2023
Filed:
Sep. 17, 2018
Berkin B.v., Ruurlo, NL;
Universiteit Twente, Enschede, NL;
Stichting Voor DE Technische Wetenschappen, Utrecht, NL;
Yiyuan Zhao, Ruurlo, NL;
Henk-Willem Veltkamp, Ruurlo, NL;
Yaxiang Zeng, Ruurlo, NL;
Joost Conrad Lötters, Ruurlo, NL;
Remco John Wiegerink, Ruurlo, NL;
BERKIN B.V., Ruurlo, NL;
UNIVERSITEIT TWENTE, Enschede, NL;
STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN, Utrecht, NL;
Abstract
The invention relates to a method of fabricating a micro machined channel, comprising the steps of providing a substrate of a first material and having a buried layer of a different material therein, and forming at least two trenches in said substrate by removing at least part of said substrate. Said trenches are provided at a distance from each other and at least partly extend substantially parallel to each other, as well as towards said buried layer. The method comprises the step of forming at least two filled trenches by providing a second material different from said first material and filling said at least two trenches with at least said second material; forming an elongated cavity in between said filled trenches by removing at least part of said substrate extending between said filled trenches; and forming an enclosed channel by providing a layer of material in said cavity and enclosing said cavity.