Semiconductor light emitting device and method for manufacturing semiconductor light emitting device

Abstract

Method for manufacturing semiconductor light-emitting device having a substrate, a metal layer over the substrate, and a semiconductor layer over the metal layer. The semiconductor layer includes a light-emitting layer, and with respect to the light-emitting layer, a first conductivity type layer at a substrate side and a second conductivity type layer opposite the substrate. The second conductivity type layer includes a first layer forming a semiconductor layer surface and a second layer at the substrate side with respect to the first layer. The method includes exposing a second layer surface by selectively removing the first layer, forming an uneven surface portion of the second layer by frost processing the exposed surface, forming an electrode over the first layer, forming a space between an end portion of the first layer and a peripheral edge of the electrode by side-etching the first layer toward a lower side of the electrode using a nitric acid-based dilute solution, and forming another electrode below the substrate.