The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 11, 2023

Filed:

Sep. 24, 2020
Applicants:

Yuji Zhao, Chandler, AZ (US);

Kai Fu, Tempe, AZ (US);

Houqiang Fu, Tempe, AZ (US);

Inventors:

Yuji Zhao, Chandler, AZ (US);

Kai Fu, Tempe, AZ (US);

Houqiang Fu, Tempe, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 21/30 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 21/324 (2006.01); H01L 29/20 (2006.01); H01L 29/872 (2006.01); H01L 29/808 (2006.01); H01L 29/735 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0661 (2013.01); H01L 21/0254 (2013.01); H01L 21/02057 (2013.01); H01L 21/0262 (2013.01); H01L 21/02389 (2013.01); H01L 21/02634 (2013.01); H01L 21/3006 (2013.01); H01L 21/30612 (2013.01); H01L 21/3245 (2013.01); H01L 29/0623 (2013.01); H01L 29/2003 (2013.01); H01L 29/735 (2013.01); H01L 29/8083 (2013.01); H01L 29/872 (2013.01);
Abstract

Fabricating a regrown GaN p-n junction includes depositing a n-GaN layer on a substrate including n-GaN, etching a surface of the n-GaN layer to yield an etched surface, depositing a p-GaN layer on the etched surface, etching a portion of the n-GaN layer and a portion of the p-GaN layer to yield a mesa opposite the substrate, and passivating a portion of the p-GaN layer around an edge of the mesa. The regrown GaN p-n junction is defined at an interface between the n-GaN layer and the p-GaN layer. The regrown GaN p-n junction includes a substrate, a n-GaN layer on the substrate having an etched surface, a p-GaN layer on the etched surface, a mesa defined by an etched portion of the n-GaN layer and an etched portion of the p-GaN layer, and a passivated portion of the p-GaN layer around an edge of the mesa.


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