The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2023
Filed:
Sep. 22, 2020
Applicant:
Suzhou Oriental Semiconductor Co., Ltd., Jiangsu, CN;
Inventors:
Assignee:
SUZHOU ORIENTAL SEMICONDUCTOR CO., LTD., Jiangsu, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3065 (2006.01); H01L 29/06 (2006.01); H01L 21/02 (2006.01); H01L 21/265 (2006.01); H01L 21/306 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0634 (2013.01); H01L 21/02532 (2013.01); H01L 21/02579 (2013.01); H01L 21/26513 (2013.01); H01L 21/3081 (2013.01); H01L 21/30604 (2013.01);
Abstract
Disclosed is a method for manufacturing a semiconductor super-junction device. The method includes: a p-type column is formed through an epitaxial process, and then a gate is formed in a self-alignment manner.