The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2023
Filed:
May. 13, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Surojit Ganguli, Tempe, AZ (US);
Todd Robert Dunn, Cave Creek, AZ (US);
Ankit Kimtee, Phoenix, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); G01N 21/03 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); G01N 21/0303 (2013.01); H01L 29/0665 (2013.01);
Abstract
A laser alignment fixture for a reactor system may be used to align components of the reactor system to allow for a uniform deposition of a thin film onto a substrate. The laser alignment fixture may include: a lid assembly; and a plurality of laser and sensor assemblies. The laser alignment fixture may align at least: a flow control ring, a susceptor, and a side wall of the reactor system.