The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 11, 2023

Filed:

Oct. 27, 2021
Applicant:

California Institute of Technology, Pasadena, CA (US);

Inventors:

Michael L. Roukes, Pasadena, CA (US);

Chung Wah Fon, Alhambra, CA (US);

Ewa Rej, Pasadena, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 22/00 (2006.01); H01J 49/26 (2006.01); H01J 49/00 (2006.01);
U.S. Cl.
CPC ...
G01N 22/00 (2013.01); H01J 49/0013 (2013.01); H01J 49/26 (2013.01);
Abstract

A NEMS readout system includes a sensor array comprising a plurality of sensors. Each sensor of the plurality of sensors including a resonator with frequency characteristics different from the resonator of each other sensor of the plurality of sensors. A readout signal indicative of a plurality of output signals is collected from the sensor array. Each output signal of the plurality of output signals corresponding to one of the plurality of sensors. An analysis of the plurality of output signals is performed to identify a plurality of resonant frequencies and to detect a frequency shift associated with at least one of the plurality of resonant frequencies.


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