The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2023
Filed:
Aug. 02, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/35 (2006.01);
U.S. Cl.
CPC ...
C23C 14/35 (2013.01); H01J 37/3405 (2013.01); H01J 37/3455 (2013.01); H01J 37/3464 (2013.01); H01J 2237/332 (2013.01);
Abstract
According to one aspect of the present disclosure, a method of coating a substrate () with at least one cathode assembly () having a sputter target () and a magnet assembly () that is rotatable around a rotation axis (A) is provided. The method comprises: Coating of the substrate () while moving the magnet assembly in a reciprocating manner in a first angular sector (); and subsequent coating of the substrate () while moving the magnet assembly () in a reciprocating manner in a second angular sector () different from the first angular sector (). According to a second aspect, a coating apparatus for performing said method is provided.