The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 11, 2023

Filed:

Jun. 22, 2020
Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Choong-Ho Lee, Yongin-si, KR;

Jung-Min Lee, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); C23C 16/04 (2006.01); C23C 14/24 (2006.01);
U.S. Cl.
CPC ...
C23C 14/04 (2013.01); C23C 14/24 (2013.01); C23C 14/243 (2013.01); C23C 16/042 (2013.01); C23C 16/04 (2013.01); Y10T 29/49826 (2015.01); Y10T 29/49828 (2015.01);
Abstract

A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. The thin film deposition apparatus includes a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; and a barrier wall assembly including a plurality of barrier walls arranged in the first direction so as to partition a space between the first nozzle and the second nozzle.


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