The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 11, 2023

Filed:

Feb. 15, 2017
Applicant:

Konica Minolta, Inc., Tokyo, JP;

Inventors:

Kazunari Tada, Hachioji, JP;

Naoki Shimizu, Hachioji, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/06 (2006.01); G01N 29/24 (2006.01); H01L 41/187 (2006.01); H01L 41/332 (2013.01); H01L 41/338 (2013.01); H01L 41/37 (2013.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0688 (2013.01); B06B 1/0629 (2013.01); B06B 1/0666 (2013.01); G01N 29/2437 (2013.01); H01L 41/1875 (2013.01); H01L 41/332 (2013.01); H01L 41/338 (2013.01); H01L 41/37 (2013.01); H04R 31/00 (2013.01); B06B 1/0622 (2013.01); Y10T 29/42 (2015.01);
Abstract

There is provided a method for producing a piezoelectric element, which allows for forming a columnar microstructure with a small width and a high aspect ratio. The method is intended to produce a piezoelectric elementincluding a three-dimensional structure grouphaving a plurality of the three-dimensional structuresandformed in a plate-like or columnar shape with a width of 30 μm or less and a height of 80 μm or more. The production method includes a first process of fabricating a plurality of plate-like or columnar precursor shapeson a bulk materialformed of a Pb-based piezoelectric material, and a second process of reducing the width of the precursor shapesto a predetermined value using an etching liquid.


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