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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11623246 B1

PDFFull Text
Date of Patent:
Apr. 11, 2023

Filed:

Feb. 07, 2019

Piezoelectric micromachined ultrasound transducer device with piezoelectric barrier layer

Applicant:

Invensense, Inc., San Jose, CA (US);

Inventors:

Emad Mehdizadeh, San Jose, CA (US);

Bongsang Kim, Mountain View, CA (US);

Chienliu Chang, San Jose, CA (US);

Leonardo Baldasarre, San Jose, CA (US);

Nikhil Apte, Palo Alto, CA (US);

Xiaoyue Jiang, San Jose, CA (US);

Mei-Lin Chan, San Jose, CA (US);

Assignee:

INVENSENSE, INC., San Jose, CA (US);

Attorneys:

Haley Guiliano LLP

Joshua Van Hoven

Stefan D. Osterbur

Primary Examiner:

Shawki S Ismail

Assistant Examiner:

Monica Mata

Int. Cl.
CPC ...
B06B 1/06 (2006.01); B06B 1/02 (2006.01); H01L 41/04 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); H01L 41/29 (2013.01); H01L 41/332 (2013.01); H01L 41/313 (2013.01); G06V 40/13 (2022.01);
U.S. Cl.
CPC ...
B06B 1/0662 (2013.01); B06B 1/0207 (2013.01); B06B 1/0622 (2013.01); B06B 1/0644 (2013.01); H01L 41/042 (2013.01); H01L 41/0475 (2013.01); H01L 41/0478 (2013.01); H01L 41/0825 (2013.01); H01L 41/1876 (2013.01); H01L 41/29 (2013.01); H01L 41/313 (2013.01); H01L 41/332 (2013.01); B06B 2201/55 (2013.01); B06B 2201/70 (2013.01); G06V 40/1306 (2022.01);
Abstract

A piezoelectric micromachined ultrasound transducer (PMUT) device may include a plurality of layers including a structural layer, a piezoelectric layer, and electrode layers located on opposite sides of the piezoelectric layer. Conductive barrier layers may be located between the piezoelectric layer and the electrodes to the prevent diffusion of the piezoelectric layer into the electrode layers.

Find Patent Forward Citations

Mehdizadeh, Emad. (2023). Piezoelectric micromachined ultrasound transducer device with piezoelectric barrier layer (U.S. Patent No. 11623246). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11623246

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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